师资队伍

个人简介

徐庆达，工学博士。2012年本科、2016年硕士毕业于中北大学省部共建动态测试技术国家重点实验室，2025年博士毕业于上海交通大学微米/纳米加工技术全国重点实验室，同年就职于山东大学未来技术学院。研究方向聚焦于MEMS水听器，脑机接口器件及微系统等多学科交叉领域。在Nature Communications, ACS Nano, Nano Energy, Biosensors and Bioelectronics和 Microsystems and Nanoengineering 等国际知名期刊发表SCI论文20余篇；在IEEE MEMS, Transducers等微机电系统领域顶级会议发表论文10余篇。已申请国家发明专利12项，其中授权4项。担任Sensors and Actuators A: Physical, IEEE Transactions on Electron Devices和Microchemical Journal等国际期刊审稿人。

研究领域：

1.微机电系统（MEMS）传感器与执行器

2.智能感知器件及其交叉领域（极端环境、生物医学等）

3.微纳加工技术

代表性成果

[1] Xu, Q.; Xi, Y.; Wang, L.; Du, Z.; Xu, M.; Ruan, T.; Cao, J.; Zheng, K.; Wang, X..; Yang, B.; Liu, J. Q., An Opto-electrophysiology Neural Probe with Photoelectric Artifact-Free for Advanced Single-Neuron Analysis.Acs Nano2024,18(36), 25193-25204.

[2] Xu, Q.; Xi, Y.; Wang, L.; Xu, M.; Ruan, T.; Du, Z.; Jiang, C.; Cao, J.; Zhu, X.; Wang, X.; Yang, B.; Liu, J.,In situself-referenced intracellular two-electrode system for enhanced accuracy in single-cell analysis.Biosensors & Bioelectronics2024,253, 116173.

[3] Xu, Q.; Wang, L.; Xi, Y.; Ruan, T.; Cao, J.; Xu, M.; Zheng, K.; Du, Z.; Wei, N.; Wang, X..; Yang, B.; Liu, J., An Efficient MEMS Microelectrode Array with Reliable Interelectrode Insulation Processes for In Vivo Neural Recording.Small2025,21(10), 2407950.

[4] Xu, Q.; Xi, Y.; Du, Z.; Wang, L.; Ruan, T.; Xu, M.; Cao, J.; Yang, B.; Liu, J.; IEEEInOptoelectronic integrated ultramicroelectrode for optical stimulation and electrical recording of single-cell, 36thIEEE 36th International Conference on Micro Electro Mechanical Systems Conference (MEMS). IEEE, 2023,384-387.

[5] Xu, Q.; Wang, L.; Xi, Y.; Guo, Z.; Ruan, T.; Shi, Y.; Yang, B.; Liu, J.; IEEEInAnodic-bonding-assisted silicon microelectrode array for neural applications,2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). IEEE, 2022: 377-380.

[6] Xu, Q.; Zhang, G.; Ding, J.; Wang, R.; Pei, Y.; Ren, Z.; Shang, Z.; Xue, C.; Zhang, W., Design and implementation of two-component cilia cylinder MEMS vector hydrophone. Sensors and Actuators A-Physical 2018, 277, 142-149.

[7] Xu, Q.; Zhang, G.; Zhao, Y.; Wang, R.; Ding, J.; Zhang, X.; Xue, C.; Zhang, W., New insight into contradictive relationship between sensitivity and working bandwidth of cilium MEMS bionic vector hydrophone. Journal of Micromechanics and Microengineering 2019, 29 (11), 115016.